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Abnormal Oxidation of TiSi2 in Gate Stacks Found at 750–850°C

Published online by Cambridge University Press:  31 January 2011

Cora Lind

Abstract

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Type
Research/Researchers
Information
MRS Bulletin , Volume 25 , Issue 11: Molecule-Based Magnets , November 2000 , pp. 10
Copyright
Copyright © Materials Research Society 2000